PRODUCT FAMILIES ::
DOVER - AIR BEARING TABLES
Dover’s air bearing stages are used in a variety of applications with different linear positioning requirements. Dover’s air bearing tables are available in different sizes depending on the specific application requirements. Dover’s motion control hardware and expertise can be packaged with any of Dover’s positioning products.
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The Airglide linear table utilizes air bearing way technology to provide backlash free, accurate and repeatable linear motion for high throughput step or scan motion. Air bearing stage applications include semiconductor and LED inspection and laser processing equipment. | Travel | 150 - 1,000 mm | | Accuracy | < ± 1 μm | | Repeatability | < ± 0.3 μm | | Straightness | < ± 0.5 μm |
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Dover's Fiberbeam Series linear stage utilizes air bearing stage technology to provide backlash free, repeatable linear motion with sub-micron accuracy in a miniature package. The unique linear stage design has no moving cables for improved reliability. | Travel | 20 - 100 mm | | Accuracy | < ± 1 μm | | Repeatability | < ± 0.1 μm | | Straightness | < ± 0.2 μm |
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Legacy Products
- Airbeam™ Single Axis Shuttle
- MAB -100 Linear Motor Stage
