The Dover Airglide table combines the ultimate in performance, reliability and value. The stage design uses ultra precision air bearing ways providing extremely smooth motion, clean operation, and reliability.  Its brushless linear servo motor allows for high speeds with no maintenance, making it ideal for use in high throughput applications.

These units can be setup as an individual axis (with travel of 100 mm up to 1,000 mm) or stacked as an XY assembly with upper axis travels up to 400 mm.  Additional vacuum and signal lines can also be made available on the stationary base plate, and routed to the top plate.

The Airglide also includes high flex cabling with standard termination points for single and XY configurations.  This cabling system can greatly simplify external wiring for convenient integration.

A linear encoder is standard and available in several resolutions and accuracy grades.

Dover offers complete control packages, low profile Z-theta assemblies, and optional wafer chucks.

Precision machined components offer:

• < 1 um Accuracy (with 2 pt. comp)
• Velocity stability < 0.5% while scanning
• Industry leading straightness (± 0.5 µm)
• Air bearing and brushless linear motor provides maintenance free operation

Technical Data Sheet  

CAD Download